Work

Sustainable Wafer-Scale Integration of Epitaxial ZnO on Silicon for Piezoelectric Devices

Year: 2025

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.5c11133

Authors: David Sanchez-Fuentes, Abbes Rahal, Rudy Desgarceaux, Lorenzo García, Samir Bouisri, Sijie Ding, Nicolas Camara, Fabien Pascal, Ricardo García-Bermejo, Nicolas Guillaume, Gustavo Ardila, Jaume Gazquez, César Magén, Sergi Plana-Ruiz, Cathy Guasch, Adrian Carretero-Genevrier

Institutions: Centre National de la Recherche Scientifique, Université de Montpellier, Institut d'Électronique et des Systèmes, EPF - École d'ingénieurs, Institut polytechnique de Grenoble, Centre de Radiofréquences, Optique et Micro-nanoélectronique des Alpes, Université Savoie Mont Blanc, Université Grenoble Alpes, Universitat Autònoma de Barcelona, Consejo Superior de Investigaciones Científicas, Universidad de Zaragoza, Instituto de Nanociencia y Materiales de Aragón, Universitat Rovira i Virgili

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Agencia Estatal de Investigación, H2020 European Research Council

Awards: G1212303713, New sensor devices based on soft chemistry assisted nanostructured functional oxides on Si integrated systems, G4267377771

OpenAlex ID: W4415927868

FWCI: 0.472

Cites: 49

Cited by: 2

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