Work

Spatial structure of a radio-frequency magnetron plasma at various Ar gas pressures for hydrophobic film preparation with a fluoropolymer PFA target

Year: 2025

Type: article

Abstract: HighlightsElectron magnetization in an RF magnetron plasma is discussed based on simulated magnetic field distributions.Heated Langmuir probe measurements clarified the spatial structure of the ion flux.Ion flux distribution has one peak in radial direction at 0.1 Pa, while it has two peaks at 0.3 and 0.5 Pa.The first peak position is determined by the E × B drift motion.Collision effects play an important role for determining the ion flux distribution.

Source: Vacuum

DOI: 10.1016/j.vacuum.2025.114889

Authors: Yasunori Ohtsu, Ryohei Kuno, Takeshi Yasunaga, Julian Schulze

Institutions: Saga University, Osaka Electro-Communication University, Ruhr University Bochum

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $2,860

Funders: Japan Society for the Promotion of Science London, Deutsche Forschungsgemeinschaft, JKA Foundation, Japan Society for the Promotion of Science