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A Novel Beam-Tilt Technique in Transmission Electron Microscopy (TEM): Application for Semiconductor Use Cases

Year: 2025

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2025p0349

Authors: Chu-Ping Yu, Chen Li, Chunhua (Emma) Tang, Dominique Delille, Aidan Arthur Taylor, Paola Favia, Olivier Richard, Roger Loo

Institutions: Thermo Fisher Scientific (Netherlands), Infineon Technologies (Austria), IMEC

Language: English

Topic: Advanced Electron Microscopy Techniques and Applications

Subfield: Structural Biology

Field: Biochemistry, Genetics and Molecular Biology

Domain: Life Sciences

Open Access status: closed

OpenAlex ID: W4415990549

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