High-accuracy vectorial Hopkins lithography modeling with full incident-angle Mask3D awareness
Year: 2025
Type: article
Source: Photonics Research
DOI: 10.1364/prj.578515
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3641333820, G758928501
OpenAlex ID: W4416079195