Work

Lensless Through-Silicon Microscopy System for Precise Alignment in Photonic Integration Processes

Year: 2025

Type: conference-paper

DOI: 10.23919/empc63132.2025.11222432

Authors: Aleksandr Vlasov, Igor Shevkunov, Karen Egiazarian, Andrei Gurovich, Denis Rozhkov, Mikko Närhi, Jukka Viheriälä, Mircea Guina

Institutions: Tampere University, University of Tampere, Technische Universität Ilmenau

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4416137174

FWCI: 2.358

Cites: 30

Cited by: 1

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