Work

Development of an original compact multigas detection system based on MEMS components

Year: 2025

Type: article

Abstract: An original compact multigas detection system based on micro electro mechanical systems components is presented. A micro preconcentrator, a micro separation column and a micro-thermal conductivity detector are coupled to each other using a novel micro-machined fluidic circuit board, simplifying the fabrication and assembly of these components with significant savings in manufacturing time, footprint and robustness of the overall system. The performances of the system are illustrated with the analysis of several typical volatile organic compounds mixtures.

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/ae1e88

Authors: Florence Ricoul, Jean-Francois Beche, Mahfod Benessalah, Stéphane Caplet, Murielle Jurdit, Emilie Lefrancois, Alexandre Teulle, Jean-Baptiste Tissot

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information, Université Grenoble Alpes

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,325

OpenAlex ID: W4416154341

FWCI: 0.228

Cites: 23

Cited by: 1

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