Work

Development of Optical Devices Using MEMS Technology

Year: 1994

Type: conference-paper

DOI: 10.1115/imece1994-0499

Authors: Victor White, Reza Ghodssi, Greg Fish, Denice D. Denton, Leon McCaughan, Sateesh Bajikar

Institution: University of Wisconsin–Madison

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4416171040

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