Work

Broadband optical enhancement of suspended Ge-on-Si infrared absorbers by using backside etching holes and a metallic reflector

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004901

Authors: Ching-Yu Hsu, Guan-Hong Chen, Ru-Hsuan Hsu, Jia-Ming Liu, Zingway Pei

Institutions: National Yang Ming Chiao Tung University, National Chung Hsing University, University of California, Los Angeles

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science and Technology Council

Awards: Road to the Next-Generation of High-Performance Computing for 3.2tbps Si-Photonics Optical Engines( I ), High Speed, High Response, and Spectral Broadband Gesn Nanowire Arrays for Short-Wavelength Mid-Infrared Photodetection, A Tb/S Chip-To-Chip Data Link for Low-Power High-Bandwidth In-Package Optical I/Os( I )

OpenAlex ID: W4416221631

FWCI: 0.453

Cites: 32

Cited by: 2

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