Work

Magnetic field gradient-controlled plasma tuning in capacitively coupled discharges via electron beam injection

Year: 2025

Type: article

Abstract: This study employs 1D particle-in-cell/Monte Carlo collision simulations to systematically investigate the modulation of capacitively coupled plasma by a unidirectional electron beam under tunable magnetic field gradients. The results reveal a remarkable sensitivity of electron beam injection to both the orientation and intensity of the magnetic field gradient, enabling precise tailoring of plasma properties. Critically, the contribution of injected electrons to the discharge is maximized when their cyclotron radius matches the electrode gap, yielding peak plasma density. Furthermore, while ion bombardment energy remains stable under optimal beam injection, the ion flux exhibits significant modulation, demonstrating a decoupling between energy and flux control. These findings establish magnetic field gradients as a powerful tool for real-time plasma tuning in applications requiring dynamic control of density and ion flux.

Source: Journal of Applied Physics

DOI: 10.1063/5.0280911

Authors: Shali Yang, Jie Tang, Sicheng Liu, Qiutian Yu, Xinli Zhao

Institution: University of Shanghai for Science and Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,500

Funders: Natural Science Foundation of Shanghai, National Natural Science Foundation of China