A novel high-sensitivity MOEMS gyroscope based on a double layer two-dimensional photonic crystal array
Year: 2025
Type: article
Abstract: Most MEMS (Micro-electromechanical systems) gyroscopes currently monitor the displacement caused by angular velocity using capacitive detection solutions. However, several inevitable faults in this technology, like parasitic capacitance and electromagnetic interference, reduce the gyroscopes’ precision due to their high sensitivity and robust anti-interference qualities. Lately, MEMS gyroscopes now have optical detecting components that are more sensitive and more resistant to interference, which are referred to as MOEMS (micro-opto-electro-mechanical systems) gyroscopes. Nevertheless, different gyroscope structures have various modes of motion, and their integration with optical detection structures still presents significant challenges. This paper develops a high-sensitivity micro-opto-electromechanical systems (MOEMS) y-axis gyroscope based on two structures from a double layer two-dimensional photonic crystal array (2 L 2DPCA). This design uses a two-dimensional photonic crystal array for optical detect based on two-layer structure, one structure fixed on the substrate base and the other movable with a sensing mass which integrated a 2 L 2DPCA in the gyroscope design significantly enhances the sensor’s performance by optimizing light confinement and minimizing energy loss, thus enabling more precise angular velocity measurement tools. Additionally, the dual-decoupled beam is designed, resulting in separate the non-planar movements of the two sides. Experimental results highlight the device’s response to rotational motion and its potential for real-time performance in various engineering and aerospace environments. According to simulation results, the two-dimensional photonic crystal array demonstrates excellent in-plane uniformity and significant elimination of cross-coupling errors. achieving excellent coupling error suppression. Additionally, the perturbative forces in the non-sensitive directions x and y can be suppressed by the dual-decoupled coupling beams. Lastly, the simulation confirms that the mechanical sensitivity reaches 57.82 nm/(∘/s), and the final output sensitivity, including optical- electrical conversion, is approximately 31.24 mV/(∘/s), and angular random walk of 3.77 × 10−5 °/ h1/2 when the Coupling Gap d≈0.1–0.2 μm. This indicates that high sensitivity and robust anti-interference capabilities are features of the developed gyroscope. The proposed gyroscope significantly enhances measurement accuracy, reduces noise, and increases dynamic range, making it a promising candidate for advanced navigation and precision sensing applications Most micro-electromechanical systems (MEMS) gyroscopes use capacitive detection to sense displacement from angular velocity, but parasitic capacitance and electromagnetic interference limit precision. Micro-opto-electro-mechanical systems (MOEMS) gyroscopes replace capacitive readout with optical detection, improving sensitivity and interference resistance, yet integrating optical structures with diverse motion modes remains challenging. We propose a high-sensitivity MOEMS y-axis gyroscope based on a double-layer two-dimensional photonic crystal array (2L2DPCA). One photonic layer is fixed to the substrate and the second is attached to a movable sensing mass, which enhances light confinement and reduces optical energy loss. A dual-decoupled beam design isolates nonplanar motion and suppresses cross-coupling in the x and y axes. Simulations show excellent in-plane uniformity and coupling-error suppression. Mechanical sensitivity reaches 57.82 nm/(°/s); overall output sensitivity after optoelectronic conversion is ≈31.24 mV/(°/s). Angular random walk (ARW) is 3.77×10⁻⁵ °/h1/2 for coupling gaps d≈0.1–0.2μm. Experimental results validate rotational response and indicate real-time performance potential in engineering and aerospace environments. The proposed device combines high sensitivity, reduced noise, and robust anti-interference characteristics, improving measurement accuracy and dynamic range for compact navigation and precision sensing applications.
Authors: Jamal N. A. Hassan, Hamedalneel Babiker Hamid, Tianjun Ma, Chingmai Ko, Habib Khan, Muhammad Hanif Ahmed Khan Khushik, Meh Jabeen, Zeeshan Anjum, Abigail Akosua Addobea, Adeel Abbas, Muhammad Abdul
Institution: Quanzhou University of Information Engineering
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $1,226
OpenAlex ID: W4416263685