Innovative Digital Patterning by LITHOSCALE® XT for UHD FO WLP and HD PLP Required in 3D Integration
Year: 2025
Type: article
Abstract: Fan-out panel level packaging (FO PLP) represents a growing segment of the overall FO packaging technologies, with designers motivated to transition from wafer to panels to achieve enhanced utilization of multi-die packages and optimized CoO. In the present investigation, LITHOSCALE® XT system, which has been proven for UHD FO WLP, was utilized for lithographic patterning of redistribution layer (RDL) and VIA structures for application in FO PLP for substrate 300×300 mm². This innovative equipment overcomes the limitations of legacy exposure technology, especially for large die sizes interposer patterning. The advanced software has been optimized to meet the demands of challenging 3D integration, representing a significant technological innovation that addresses the requirements for the future HPC and AI devices driving innovation and efficiency in the semiconductor industry.
Source: IMAPSource Proceedings
DOI: 10.4071/001c.147222
Authors: Ksenija Varga, Roman Holly, Tobias Zenger, Boris Považay, Matthias Brunnbauer
Institution: EV Group (Austria)
Language: English
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W4416293933