Work

Structure and properties of piezoelectric aluminum nitride thin films deposited by radio-frequency magnetron sputtering for surface acoustic wave applications

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0004938

Authors: Al-Ahsan Talukder, Nina Baule, Maximillian Steinhorst, Robert Rechenberg, Thomas Schuelke, Qi Hua Fan

Institutions: Michigan State University, Fraunhofer USA

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

Awards: Resolving Abnormal Target Erosion in High Frequency Magnetron Discharge, Manufacturing of High-Efficiency Perovskite Solar Cells via Coupled Ion Source and Magnetron Discharges, PFI-TT: Developing an Efficient Computation Scheme for Modeling Low-Pressure Plasmas

OpenAlex ID: W4416466109

FWCI: 0.937

Cites: 36

Cited by: 4

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