Work

Experimental study of intermediate-Pressure RF-CCP in Ar-O2 mixtures

Year: 2024

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Zhang, Shu, Curley, Garrett, Booth, Jean-Paul

Institution: Laboratoire de Physique des Plasmas

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4416537091

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