Work

Oxygen atom kinetics in pulsed Radiofrequency Capacitively-coupled plasmas in pure O2 at intermediate pressures

Year: 2024

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Booth, Jean-Paul, Zhang, Shu, Curley, Garrett

Institution: Laboratoire de Physique des Plasmas

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4416554724

FWCI:

Cites:

Cited by:

Related to: