Work

Simulation and Characterization of Capacitively-Coupled Argon Plasma at Intermediate Pressure

Year: 2024

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Sahu, Rupali, Nuwal, Nakul, Bera, Kallol, Rauf, Shahid, Booth, Jean-Paul, Zhang, Shu, Curley, Garrett

Institutions: Applied Materials (United States), Laboratoire de Physique des Plasmas

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4416554726

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