ALD and ALE Applications in 3D Monolithic Device Integration
Year: 2025
Type: conference-abstract
Source: ECS Meeting Abstracts
Authors: Thorsten Lill, Andreas Fischer, Fred Roozeboom
Institution: University of Twente
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4416567997
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