A Dual-Mode Anemometer Fabricated in 65-nm CMOS BEOL Without Postprocessing
Year: 2025
Type: article
Abstract: A thermal anemometer was industrially fabricated without any pre-, co- or post-processing for the first time. The total sensor footprint is only$0.245 \,\mathrm{m}\mathrm{m}^{2}\,$using TSMC's$65$–$\mathrm{n}\mathrm{m}$CMOS process. The dual-mode anemometer measures wind speeds up to$1.2 \,\mathrm{m}\mathrm{/}\mathrm{s}$with a precision of$3.1 \,\%$(or$0.037 \,\mathrm{m}\mathrm{/}\mathrm{s}$) calorimetrically. Alternatively, using the second hot-element mode the sensor measures in the range of$0 \,\mathrm{m}\mathrm{/}\mathrm{s}\,{\mathrm{to}}\, 7.5 \,\mathrm{m}\mathrm{/}\mathrm{s}$with a$0.1 \,\mathrm{m}\mathrm{/}\mathrm{s}$accuracy and an average$1.34 \,\%$precision. This is the first industrially fabricated thermopile-based CMOS anemometer, paving the way for a compact foundry SoC with inbuilt underlying computing for low-cost air speed monitoring.
Source: IEEE Sensors Letters
Institution: University of Twente
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $2,645
OpenAlex ID: W4416582646