Work

Magnetized, radiofrequency-driven hollow cathode chemical-vapor deposition of ultrathick hydrogenated amorphous carbon

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004905

Authors: John S. Miller, Leonardus Bimo Bayu Aji, S. O. Kucheyev, Steven Falabella

Institution: Lawrence Livermore National Laboratory

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4416587462

FWCI:

Cites: 45

Cited by:

Related to: