Work

PEALD of Antiferroelectric Fluorite for High Energy Storage Applications

Year: 2025

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Magagnin, Grégoire, Le Berre, Martine, Gonzalez, S., Deleruyelle, Damien, Bouaziz, Jordan, Vilquin, Bertrand

Institutions: Institut des Nanotechnologies de Lyon, Institut National des Sciences Appliquées de Lyon

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

OpenAlex ID: W4416737637

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