Work

A breakthrough in contact engineering for sub-3 nm FinFETs: overcoming the fin-pitch bottleneck

Year: 2025

Type: article

Source: Nanotechnology

DOI: 10.1088/1361-6528/ae2513

Authors: Yoonwoo Choi, Bogyeong Kim, Geonu An, Sunwoo An, Donghyeon Kim, Jaehyun Lee

Institution: Pusan National University

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Pusan National University, Busan Metropolitan City

Award: G5453288134

OpenAlex ID: W4416754285

FWCI:

Cites: 12

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