Work

Two‐Dimensional Fluid‐Analytical Hybrid Modelling of the Electromagnetic Effects in Very High Frequency Capacitively Coupled Ar/CF 4 Plasmas

Year: 2025

Type: article

Source: Plasma Processes and Polymers

DOI: 10.1002/ppap.70100

Authors: Xin‐Yang Li, Yu‐Ru Zhang, You‐Nian Wang

Institutions: Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4416777385

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Cites: 39

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