Work

Optical Emission Spectroscopy Analysis of the BOSCH Process Utilizing k-Means Clustering and Dynamic Mode Decomposition

Year: 2025

Type: conference-paper

DOI: 10.1109/ppps56198.2025.11248711

Authors: T. Seifert, M. Haase, M.A. Sayyed, M. Küchler, S. Zieger, J. Langer, D. Reuter

Institutions: Chemnitz University of Technology, Fraunhofer Institute for Electronic Nano Systems

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4416799064

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