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Computational Study of Gas‐Phase and Surface Kinetics in a Clamshell Type Microwave Plasma Chemical Vapor Deposition Reactor for Diamond Growth

Year: 2025

Type: article

Source: physica status solidi (b)

DOI: 10.1002/pssb.202500320

Authors: Venkata Sai Teja Madana, Subramanian Manikandan, Akash Akash, Sanjeev Kumar Pandey, Kumaran Naveen Kumar, Tiruvachi Natarajan Sairam, Sathyan Subbiah, Narayanaperumal Arunachalam, Mamidanna Sri Ramachandra Rao

Institution: Indian Institute of Technology Madras

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4416914744

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Cites: 19

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