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Backside Etching Thickness Dependence and Reconfigurable Logic Gate Implementation in AlGaN/GaN HEMTs

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Year: 2025
Type: article
Source: ACS Applied Electronic Materials
DOI: 10.1021/acsaelm.5c02196
Authors: Zheng Shi, Sirui Wu, Zheheng Liu, Tianlong Xie, Hao Huang, Mingyuan Xie, Yongjin Wang, Hongbo Zhu, Xumin Gao
Institution: Nanjing University of Posts and Telecommunications
Language: English

Topic: GaN-based semiconductor devices and materials
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Research of Jiangsu Higher Education Institutions of China, Graduate Research and Innovation Projects of Jiangsu Province
Awards: G2028211553, G4505709824, G4862945771, G6587366229, G7290676604, G8888446435
OpenAlex ID: W4416938179
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Cites: 34
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