Work

LTP-corrected stitching interferometer achieving sub-nanometer accuracy for x-ray mirror metrology

Year: 2025

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/5.0293552

Authors: Yanghui Wang, Shuai Zhao, Huiyun Wang, Yiyang Hu, Liang He, Shuo Fu, Zhengkun Liu, Xuewei Du, Qiuping Wang

Institutions: University of Science and Technology of China, National Synchrotron Radiation Laboratory

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: China Postdoctoral Science Foundation, National Key Research and Development Program of China, Fundamental Research Funds for the Central Universities

Awards: G6055336816, G746578376, G773485413

OpenAlex ID: W4416952201

FWCI: 0.603

Cites: 19

Cited by: 2

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