Work

Reusable and High‐Precision Soft Templates for High‐Fidelity Microscale Patterning of Terahertz Metasurface and Beyond

Year: 2025

Type: article

Source: Small Methods

DOI: 10.1002/smtd.202502141

Authors: Junxiao Liu, Yuanpeng Li, Yuanpeng Li, Yuanpei Li, Yuanpei Li, Yunxin Tan, Qiye Wen, Tingchuan Zhou, Tianlong Wen

Institutions: University of Electronic Science and Technology of China, China Academy of Engineering Physics

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G4651577005, G5852697116

OpenAlex ID: W4417023834

FWCI: 0.237

Cites: 64

Cited by: 1

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