Work

Precise evaluation of thermal transpiration effect for calibration of capacitance diaphragm gauge

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004953

Authors: Hajime Yoshida, Kimihiro Sato, Yoshinori Takei, Wataru Osada, Tomoya Kanzaki, Toru Yamaguchi, Yasuhide Yoshikawa

Institutions: National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology

Language: English

Topic: Scientific Measurement and Uncertainty Evaluation

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W4417043047

FWCI: 0.616

Cites: 32

Cited by: 1

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