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Heterogeneous Integration for Silicon Photonics Based on Micro-Transfer Printing

Year: 2025
Type: conference-paper
Abstract: Micro-transfer printing is an enabling technology to heterogeneously integrate thin-film components onto silicon photonics wafers. This tutorial will cover the basics of micro-transfer printing as well as demonstrations such as GaAs and InP opto-electronic device integration, LiNbO3 modulator integration and electronic IC integration. ©2025 The Author(s)
Language: English
Open Access status: green
OpenAlex ID: W4417052236
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Cites: 1
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