Work

Oxidant-Dependent Conduction in Early-Cycle Atomic-Layer-Deposited Al 2 O 3 and Its Impact on the Dielectric Behavior of Al 2 O 3 /TiO 2 Nanolaminates

Year: 2025

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.5c18459

Authors: Mahesh Nepal, Tara P. Dhakal

Institution: Binghamton University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

Award: PFI-TT: Next Generation High Energy Storage, Light Weight Capacitors

OpenAlex ID: W4417127946

FWCI: 0.693

Cites: 45

Cited by: 3

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