Work

Low-Temperature Laser-Crystallized Silicon Nanosheet Field Effect Transistors Enabling Monolithic 3D Integration

Year: 2025

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.5c20643

Authors: Jeong Yeon Im, Hanbin Lee, So-Jeong Park, Ji Won Park, Seonghyeon Jeong, Dae Hwan Kim, Yoon Jung Lee, Min-Ho Kang, Sung-Jin Choi

Institutions: Kookmin University, National NanoFab Center

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Research Foundation of Korea, IC Design Education Center

Awards: G4199717106, G7197832595

OpenAlex ID: W4417145879

FWCI:

Cites: 27

Cited by:

Related to: