Numerical and experimental investigation of PZT droplet ejection under pulsed voltage for electrohydrodynamic printing
Year: 2025
Type: article
Abstract: Lead zirconate titanate (PZT) has grown increasingly crucial for micro-electro-mechanical systems (MEMS) sensors, including accelerometers, vibration sensors, ultrasonic transducers, and wearable electronic devices. However, most existing fabrication methods face limitations such as incompatibility with traditional MEMS processes and high manufacturing costs. On-demand electrohydrodynamic (EHD) printing enables the low-cost fabrication of micro- and nano-scale PZT structures without the need for a mask. Unlike previous EHD printing techniques that use direct current (DC), this study proposes a PZT EHD printing method employing pulsed voltages, which offers greater flexibility. We developed a simulation model to analyze the formation of droplets under high-voltage pulses, demonstrating the droplet formation mechanisms in both dripping and jetting modes, as well as the accompanying satellite droplet phenomenon. Additionally, we investigated the effects of printing parameters and ink properties on the size of ejected droplets. Results from PZT EHD printing experiments and practical applications confirm that our proposed printing method holds significant potential for the subsequent fabrication of various MEMS PZT sensors.
Authors: Xue Yang, Mingchao Bi, Zhifu Yin, Xiao Xu
Institutions: Jilin Jianzhu University, Jilin University, First Bethune Hospital of Jilin University, Wuhan University of Science and Technology, State Key Laboratory of Refractories and Metallurgy, Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, Guilin University of Electronic Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: diamond
Award: G936155010
OpenAlex ID: W4417160265