Work

Plasma-Induced Degradation of a UV Tape in D2W Hybrid Bonding: Particle Generation Mechanisms and Pre-UV Suppression Strategy

Year: 2025

Type: article

Source: ACS Applied Electronic Materials

DOI: 10.1021/acsaelm.5c02033

Authors: Ziqi Lian, Yu Zhang, Fei Ding, Olga Bauder, Philipp Schmidt, Renxi Jin, Yudong Yang, Thomas Schmidt, Qidong Wang

Institutions: Chinese Academy of Sciences, Institute of Microelectronics, Institute of Microelectronics, University of Chinese Academy of Sciences, SUSS MicroTec (Germany)

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G4011486759, G7672084328

OpenAlex ID: W4417415291

FWCI: 0.693

Cites: 36

Cited by: 3

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