Research progress in novel chemical–mechanical synergistic enhanced polishing methods for silicon carbide substrates
Year: 2025
Type: article
Source: Nanoscale
DOI: 10.1039/d5nr04356e
Authors: Ziliang Liu, Xinhuan Niu, Jiakai Zhou, Wantang Wang, Qing Ma, Mengqi Wang, Shaobo Song, Zheng Wu, Bin Hu, Jiahui Li
Institution: Hebei University of Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4417422224