Effect of C 4 F 8 Isomers on High Aspect Ratio Contact SiO 2 Etching and Greenhouse Gas Emission
Year: 2025
Type: article
Authors: Chan Hyuk Choi, Myeong Ho Park, Hyun Woo Tak, Jun Soo Lee, Eun Koo Kim, Akihide Sato, Bong Sun Kim, Sung Taek Kim, Yong Il Kim, Dong Woo Kim, Geun Young Yeom
Institution: Sungkyunkwan University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G2252197380
OpenAlex ID: W4417440339