Anomaly Detection in Wafer Grinding Using Accumulated-generating-operation-processed In-process Sensor Data and Ensemble Learning: A Case Study
Year: 2025
Type: article
Abstract: Her research interests encompass big data analytics and heuristic optimization algorithms, with a particular focus on their applications in industrial process optimization.
Source: Sensors and Materials
DOI: 10.18494/sam5746
Authors: Chien-Chih Chen, Yao-San Lin, Hung-Yu Chen, Wei-Yuan Sun, Chih-Jung Kuo
Institution: National Chin-Yi University of Technology
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $748
OpenAlex ID: W4417475823
FWCI:
Cites:
Cited by:
Related to: