Cobalt Ion Adsorption on Polyvinyl Acetal Brushes: Impact on Silica-Nanoparticle Loading During Metal Post-Chemical Mechanical Planarization Cleaning
Year: 2025
Type: article
Source: ACS Applied Nano Materials
Institutions: Hanyang University, Ebara (Japan)
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Hanyang University
Award: G1147070919
OpenAlex ID: W4417506864