Acid-Catalyzed Liquid ALD Growth of Lanthanum Aluminate Thin Films Using Stoichiometric Injections
Year: 2025
Type: article
Institution: University of South Florida
Language: English
Subfield: Catalysis
Field: Chemical Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3838037441, G708199553
OpenAlex ID: W4417524974
