Work

MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA

Year: 2007

Type: book

Source: SPIE eBooks

Authors: Srinivas Tadigadapa, Reza Ghodssi, Albert K. Henning

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W571121583

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