Work

Principles of Lithography

Year: 2005

Type: book

Source: SPIE eBooks

DOI: 10.1117/3.601520

Author: Harry J. Levinson

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W592018936

FWCI: 8.348

Cites:

Cited by: 380

Related to: 10

Parts: 15