Diazonaphthoquinone-based Resists
Year: 1993
Type: book
Source: SPIE eBooks
DOI: 10.1117/3.2265072
Author: Ralph R. Dammel
Institutions: Celanese (United States), Celanese (Germany)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W620824851