Target Voltage and Partial Gas Pressure Dependencies of the Thin Film Synthesized by Reactive Sputtering
Year: 2000
Type: article
Source: 鶴岡工業高等専門学校研究紀要
Author: Kenji Suzuki
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W654684238