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Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range

Year: 2024

Type: article

Abstract: \nAn imaging Mueller matrix ellipsometer is used to measure structures in measuring fields in the micrometre range, which are too small for conventional ellipsometry. Line and grid structures are measured and evaluated with the help of numerical simulations using the finite element method to characterize the structure parameters.\n

Source: Springer Link (Chiba Institute of Technology)

DOI: 10.1051/epjconf/202430902010/pdf

Authors: Jana Grundmann, Bernd Bodermann

Institution: Physikalisch-Technische Bundesanstalt

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W6884554419

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