Year: 2024
Type: article
Abstract: We present how to develop virtual microcylinder- or microsphere-assisted surface topography measurement instruments. As the most critical part, the interaction between light, microcylinder and measurement object is considered based on the finite element method (FEM). Results are obtained for microcylinder-assisted conventional, interference, and confocal microscopes without necessity to repeat the time-consuming FEM simulations for each sensor.
Authors: Tobias Pahl, Lucie Hüser, Tim Eckhardt, Sebastian Hagemeier, Felix Rosenthal, Michael Diehl, Peter Lehmann
Institution: University of Kassel
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W6884554484
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