NFFA-Europe Pilot - D13.4 - Library of processes based on advanced nano-engineering for TA
Year: 2024
Type: article
Abstract: In the current document we report on a selection of new processes developed within the NFFA (NEP)project related to advanced nanoengineering for transnational access (TA). They form a new library ofprocess steps enabling new or improved capabilities for some specific nanopatterning. They arecomplementary and generally compatible with state-of-the-art microelectronics industry. Besidesdeveloping the individual core technology, we paid particular attention to novel groupings in a mix-and-match approach to study possible combinations of processes to maximize enabling capabilities fornanosystems manufacturing.
Authors: Torres-Vila, Pol, Erbas, B., Bertsch, A., Brugger, Jürgen, Cattoni, Andrea, Mailly, Dominique, Maximov, Ivan, Antoja, Jordi, Fernandez-Regulez, Marta, Uranga, Iker, Perez-Murano, Francesc
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
Funder: European Commission
OpenAlex ID: W6893078630
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