Supplementary document for Ultraviolet to mid-infrared optical properties of sputtered AlScN-on-SiO2 thin films for integrated photonic applications - 7252460.pdf
Year: 2024
Type: supplementary-materials
Abstract: supporting information and figures
Source: Figshare
Authors: Spettel, Jasmin, Andrianov, Nikolai, Dubois, Florian, Azeem, Munir, Furci, Hernan, Cassese, Tommaso, Quack, Niels, Villanueva, Luis, Moridi, Mohssen, Dao, Thang
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W6902214455
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