Supplementary document for Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips - 6003216.pdf
Year: 2022
Type: supplementary-materials
Abstract: This supplemental document provides additional information on the process flow, the connection between wafer and membrane bow and spectral information regarding the optical analysis.
Source: Figshare
Authors: Wessling, Nils, Ghosh, Saptarsi, Guilhabert, Benoit, Kappers, Menno, Hinz, Alexander, Toon, Miles, Oliver, Rachel, Dawson, Martin D., Strain, Michael
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W6902218578
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