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Supplementary document for Inverse optical scatterometry using sketch-guided deep learning - 7002462.pdf

Year: 2024

Type: supplementary-materials

Abstract: Supplement 1

Source: Figshare

DOI: 10.6084/m9.figshare.25782495

Authors: Liu, Shuo, Chen, Xiuguo, Yang, Tianjuan, Zhang, Jiahao, Liu, Shiyuan

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W6902324191

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