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Supplementary document for Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator - 7243753.pdf

Year: 2024

Type: supplementary-materials

Abstract: Supplementary Information

Source: Figshare

DOI: 10.6084/m9.figshare.27221376

Authors: Navarathna, Amy, Carey, Benjamin, Bennett, James, Khademi, Soroush, Bowen, Warwick

Language: English

Topic: Mechanical and Optical Resonators

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W6902330295

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