Supplementary document for Xenon-plasma focused ion beam processing of photonic microstructures with GaAs-based quantum dots - 6521579.pdf
Year: 2023
Type: supplementary-materials
Abstract: SEM images of micromesa structures realized fully by Xe-PFIB
Source: Figshare
Authors: Jaworski, Maciej, Chudzynska, Aleksandra, Mrowinski, Pawel, Prazmowska-Czajka, Joanna, Kijaszek, Wojciech, Große, Jan, Rodt, Sven, Reitzenstein, Stephan, Sek, Grzegorz
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W6902338946
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