Work

Comparison measurements for hybrid evaluation approaches in optical nanometrology

Year: 2024

Type: article

Abstract: \nIn the pursuit of closing the gap between nanometrology and nanofabrication, we investigate the use of advanced optical far field methods for sub-wavelength parameter reconstruction. With the goal of establishing a hybrid evaluation scheme connecting different methods and including different information channels, we performed comparison measurements on a silicon line grating sample with buried as well as not buried surface relief lines. To this end, the results of our measurement are in good agreements with each other, and the collected structure data is feasible to be used for hybrid evaluation.\n

Source: Springer Link (Chiba Institute of Technology)

DOI: 10.1051/epjconf/202430902005/pdf

Authors: Tim Käseberg, Bernd Bodermann, Matthias Sturm, Matthias Wurm, Thomas Siefke, Lauryna Siaudinyté, Astrid Tranum Rømer, Poul-Erik Hansen

Institutions: Physikalisch-Technische Bundesanstalt, Friedrich Schiller University Jena, VSL National Metrology Institute, Danish National Metrology Institute

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W6903326913

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